Broadband supercontinuum generation in nitrogen-rich silicon nitride waveguides using a 300 mm industrial platform
نویسندگان
چکیده
منابع مشابه
Photonic crystal waveguides on silicon rich nitride platform.
We demonstrate design, fabrication, and characterization of two-dimensional photonic crystal (PhC) waveguides on a suspended silicon rich nitride (SRN) platform for applications at telecom wavelengths. Simulation results suggest that a 210 nm photonic band gap can be achieved in such PhC structures. We also developed a fabrication process to realize suspended PhC waveguides with a transmission ...
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ژورنال
عنوان ژورنال: Photonics Research
سال: 2020
ISSN: 2327-9125
DOI: 10.1364/prj.379555